Sizary Products

Promecon™ 1000 [vertical furnace installation]

The Promecon 1000 supports a single processing tube, with convenient front-panel controls and an optional interface to the furnace controller for automated operation. The Promecon 1000 is ideal for R&D or qualification applications, or for small fabs.

The Promecon 1000 system consists of :

P1000 Promecon controller
P1000LE-OEM-xxx loader electrical interface unit
OPTION: P1000CI-OEM-xxx furnace controller interface unit
OPTION: P1000RD-OEM-FLF Four-line fluorescent remote display unit (optional).
Interconnect cables, etc.
Promecon Furnace Tube Assembly (FTA) [horizontal furnace], consisting of:

CNT-OEM-xxx cantilever-head upgrade unit

CIS-OEM-xxx Customized ceramic set for paddle insulation

P1000-OEM-FTH high-voltage feedthroughs

EGU-OEM-xxx electrical grounding unit

A functional block diagram of an upgraded system is shown below.

Block diagram

1] P4000 Controller

This unit contains the power supplies and controls. The electrical unit can be provided in three configurations: rack mount, vertical mount, or standalone.

The electrical unit supplies the high-voltage signal, and provides safety, interlock, and control functions.

Specifications
Dimensions………………..388mm x 388mm x 152mm (Std. 19" rack)
Access…………………..….Front panel (operation), Rear or top panel
Connecting cables..............Rear or top panel
Cable length…..……….…..To Interface unit 6m max
Cable length….…….….…..To P1000-OEM-FTH feedthroughs 20m max
Operating Environment…..Class 10,000 or better air.
Operating Temperature…..20 to 50 ºC.
Power Input………………...Single phase, 110V / 220v , 50 / 60 Hz , 800 W.
Weight…………………...….17 Kg

2] Furnace Tube Assembly (FTA)

The customer furnace tube assembly must be slightly modified to allow electric field application. The exact nature of the modifications depends on the furnace model and loader.

Vertical furnace FTA

A typical vertical furnace installation for a non-rotating pedestal uses SiC rods mounted on top of the furnace tube. The rods are connected through a spring-loaded feed thru, allowing them to self-planarize as the wafer boat rises into process position. If a quartz furnace tube is used, a SiC outer liner or grid electrode must be provided to act as a ground electrode. Two connections are made both to the wafer boat and the ground contact; dual connections allow the unit to always verify continuity of hot and ground electrodes before applying high voltage.

Upgrades of rotating pedestals are not currently available as a standard product; contact Sizary for more information

3] OPTION: P1000CI-OEM-xxx Interface Unit

The interface unit provides communication between the furnace tube controller and the Promecon™ electrical unit.

Specifications
Dimensions......................................... Up to 300mm x 150 mm x 100mm
Power Requirement........................... Single-phase, 100-250V, 50 / 60 Hz, 120W
Distance to Electrical unit.................. 6m max
Distance to furnace-controller I/O.... 1m max
Operating Temperature .....................20 ºC to 60 ºC

Due to the wide variety of loaders, furnace tubes, and process controllers installed at various facilities, some customization of the design is often required. A Sizary engineer will work with you at your site to determine the appropriate configuration for your tool set.

Promecon 1000 Safety Features

Furnace EMO causes Promecon shutdown
All components rated > 5 KV continuous use
Loader HV cables also high-T rated
All HV cables have grounded shield
HV-ON Warning Lights in clean room and chase
Promecon front-panel allows local override of furnace controller for maintenance
External electrode or SiC double-grounded:
No HV outside process tube
All accessible parts insulated
Main power switches are lock out-tag out

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