Promecon upgrades bring the benefits of Promecon technology to your existing toolset. Standard Promecon upgrades are available for most popular horizontal and vertical furnaces. If you are already using SiC tubes and boats or paddles, the upgrade requires only minimal modification to your existing furnace hardware to allow electrical contact to be made to the wafers and ensure grounding of the process tube. Furnaces with quartz tubes may require the installation of a conductive liner or mesh outer electrode. Once installed, the Promecon controller works smoothly with your existing furnace controller to provide integrated recipe-based control. Local lock-out operation is also available from the Promecon front panel for maintenance operations. Promecon can be easily turned off to return the furnace to its original operating mode for baseline measurements.

Promecon™ 1000

Promecon™ 4000